Rotatory titanium sputtering target

Product Introduction 

Rotatory Titanium Sputtering Target for Large-Area Coating — High Utilization, High Purity Solution

The rotatory titanium sputtering target from Baoji Huacan New Metal Materials Co., Ltd. is a cylindrical, high-purity titanium cathode engineered for magnetron sputtering systems. Offered in purity categories from 99.5% to 99.999%, it gives consistent density, low levels of impurities and enhanced thermal stability under difficult deposition circumstances. A rotatory design allows material utilization of 75-85% vs. planar targets with a utilization of 20-30%. This drastically reduces Cost of Ownership and downtime.

Product Material Advantages / Product Features/ Product Specification & OEM Customization

Parameter	Details
Material Grade	Grade 2, Grade 5 (Ti-6Al-4V), Grade 7, Grade 9, Grade 23
Purity Range	99.5% – 99.999% (customizable by grade)
Oxygen Content	<300 ppm
Average Grain Size	<50 microns
Bonding Ratio	≥98%
Total Indicator Runout (TIR)	<0.5 mm
Surface Roughness	Ra <0.8 µm
Backing Tube Material	Stainless Steel AISI 304/316 (Cu, Mo options available)
Bonding Method	Indium bonding or Elastomer bonding
Target Length	Up to 4,000 mm (customized)
Diameter	Customized per customer drawings
Material Standard	ASTM, AMS, DIN, ISO
Customization	OEM/ODM available; dimensions per customer requirements

Product Application

Low-E Glass for Architectural & Automotive Applications: Titanium barrier layers prevent oxidation of silver stacks during heat treatment. Rotary targets can run continuously for weeks without breaking vacuum.

Flat Panel Displays (TFT-LCD/OLED) o Titanium adhesion layers o Conductive gate electrodes It reduces the formation of particles and hence the flaws of pixels in high resolution displays.

Photovoltaics (Solar Cells): In CIGS and thin film solar manufacturing for back contact layers and diffusion barriers. Withstands high-power loads in gigawatt-scale facilities.

Optics & Decorative Coatings: Delivers consistent film thickness for functional and aesthetic coating applications for rotatory titanium sputtering target.

Why Choose Us

You don't simply receive a target. You gain a productivity edge.

The rotatory shape reduces the “racetrack effect” that is typical with flat targets. This means the full circle is used during sputtering, resulting in longer campaigns, fewer replacements and less hazardous waste.

Baoji Huacan has 10+ years of expertise in titanium machining, 40+ precision CNC machines and 1,000+ tons of yearly production capacity, providing constant quality in scale. We provide complete OEM/ODM assistance, and each target is made to your precise requirements.

Manufacturing Process

Baoji Huacan produces high purity titanium ingots with outstanding chemical homogeneity using vacuum arc remelting (VAR) and plasma arc melting (PAM).

Ingots are forged with accuracy on a 4,000-ton hydraulic press, then rolled and CNC precision machined. The result of this multi-stage process is a refined, equiaxed grain structure with an average grain size below 50 microns, which is crucial for consistent sputtering rates.

The titanium sleeve is connected to the stainless steel backing tube using Indium or Elastomer bonding techniques. Bonding ratio is more than 98%, guaranteeing dependable thermal conductivity under high power load.

Receiving Drawings

Annealing

Developing Machining Process

Finish Machining

Preparing Raw Materials

Deburring

Rough Machining

Deburring

Manufacturing Capability

Baoji Huacan operates 40+ CNC lathes, machining centers, and gantry systems for precision titanium fabrication. Annual melting capacity exceeds 5,000 tons; forging capacity exceeds 3,000 tons.

Targets up to 4,000 mm in length are producible in-house. Both prototype and mass production orders are accommodated efficiently.

melting	melting	forging	forging	rolling

Quality Control

Baoji Huacan applies rigorous multi-stage inspection to every titanium sputtering target:

· Ultrasonic C-Scan Testing: Maps the bond interface; void area must be <2% to ensure safe thermal conductivity

· GDMS (Glow Discharge Mass Spectrometry): Verifies purity at the ppm level, detecting harmful heavy metal traces

· Metallographic Analysis: Confirms equiaxed grain size and uniform crystallographic texture

· Dimensional & Straightness Checks: Laser measurement verifies TIR <0.5 mm and concentricity

· Surface Inspection: Ra <0.8 µm finish verified using surface roughness testers

· O/N Analysis: Oxygen and nitrogen levels confirmed to minimize arcing risk

Full documentation including material traceability records, inspection reports, and certificates are provided with every shipment.

Packaging & Shipping

Long rotatory targets require specialized handling to prevent bowing during transit.

· Targets are suspended in custom wooden crates that support the full length and prevent bending

· Vacuum-sealed aluminized bags with desiccants protect surfaces from oxidation

· Foam inserts cushion delicate components

· Detailed labeling and documentation included for traceability

Air freight is available for urgent orders. Sea freight supports cost-effective bulk shipments.

FAQ

Q: Why does a rotatory target achieve higher material utilization?

A：Because it rotates around a stationary magnet bar, erosion is distributed across the full circumference — eliminating the racetrack effect that wastes 70–80% of a planar target's material.

Q: What causes arcing on the target surface?

A：Arcing is typically caused by dielectric inclusions, moisture, or poor surface finish. Our targets undergo O/N analysis and surface finishing to Ra <0.8 µm to minimize this risk.

Q: Can spent backing tubes be reused?

A：Yes. We offer backing tube reclamation — the spent titanium is stripped, the steel tube is inspected and cleaned, and new material is bonded, lowering your long-term cost.

Q: What is the difference between Indium and Elastomer bonding?

A：Indium bonding offers superior thermal conductivity for high-power applications. Elastomer bonding provides flexibility and is suitable for targets with longer lengths or thermal cycling.

Q: How do you ensure the target won't bind in the end-blocks?

A：Laser-measured straightness and concentricity checks ensure TIR remains below 0.5 mm, preventing binding during rotation.

Contact Us

Get your custom rotatory titanium sputtering target today. Email sherry@hc-titanium.com for specifications, drawings, and pricing.